JPH0179829U - - Google Patents
Info
- Publication number
- JPH0179829U JPH0179829U JP1987175110U JP17511087U JPH0179829U JP H0179829 U JPH0179829 U JP H0179829U JP 1987175110 U JP1987175110 U JP 1987175110U JP 17511087 U JP17511087 U JP 17511087U JP H0179829 U JPH0179829 U JP H0179829U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- epi
- wafer chuck
- air cylinder
- spike
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987175110U JPH0179829U (en]) | 1987-11-18 | 1987-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987175110U JPH0179829U (en]) | 1987-11-18 | 1987-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0179829U true JPH0179829U (en]) | 1989-05-29 |
Family
ID=31466924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987175110U Pending JPH0179829U (en]) | 1987-11-18 | 1987-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0179829U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5919329A (ja) * | 1982-07-23 | 1984-01-31 | Hitachi Ltd | 洗浄方法とその装置 |
| JPS61128530A (ja) * | 1984-11-28 | 1986-06-16 | Canon Inc | エピスパイククラツシユ装置 |
-
1987
- 1987-11-18 JP JP1987175110U patent/JPH0179829U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5919329A (ja) * | 1982-07-23 | 1984-01-31 | Hitachi Ltd | 洗浄方法とその装置 |
| JPS61128530A (ja) * | 1984-11-28 | 1986-06-16 | Canon Inc | エピスパイククラツシユ装置 |